Summer, 2015


PH75218: Semiconductor Processor and Nano-fabrication

1. Micro and Nanomanufacturing, 2008 by Mark J. Jackson
2. Microchip Fabrication, Sixth Edition: A Practical Guide to Semiconductor Processing by Peter Van Zant
3. Fundamentals of Semiconductor Manufacturing and Process by Gary S. May (Author), Costas J. Spanos

Introduce the basic concept of semiconductor chip technology and nano processing technology, manufacturing methods and application, including many kinds of chip structure and the physical principles, nano-processing methods and devices and the applications of nano processing in different fields.