Teaching

Summer, 2015

PH75218

PH75218: Semiconductor Processor and Nano-fabrication

References:
1. Micro and Nanomanufacturing, 2008 by Mark J. Jackson
2. Microchip Fabrication, Sixth Edition: A Practical Guide to Semiconductor Processing by Peter Van Zant
3. Fundamentals of Semiconductor Manufacturing and Process by Gary S. May (Author), Costas J. Spanos

Introduction:
Introduce the basic concept of semiconductor chip technology and nano processing technology, manufacturing methods and application, including many kinds of chip structure and the physical principles, nano-processing methods and devices and the applications of nano processing in different fields.