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X-ray Grating Beam Splitter

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The interferometry with an X-ray laser as probe is a powerful tool to diagnose the electron density of a high temperature and dense plasma. Soft X-ray Mach-Zehnder (M-Z) interferometer is an important experimental setup for this interferometry. The beam splitters used in the interferometer are the most critical elements of the setup.

Grating beam splitters have been fabricated for soft X-ray Mach-Zehnder interferometer using holographic interference lithography. The grating beam splitter consists of two gratings, one works at X-ray laser wavelength of 13.9 nm with the spatial frequency of 1000 lines/mm as the operation grating, the other works at visible wavelength of 632.8 nm for pre-aligning the X-ray interferometer with the spatial frequency of 22lines/mm as the pre-alignment grating. The two gratings lie vertically on the same substrate. The main feature of the beam splitter is the use of low spatial-frequency beat grating of a holographic double frequency grating as the pre-alignment grating of the X-ray interferometer. The grating line parallelism between the two gratings can be judged by observing the diffraction patterns of the pre-alignment grating directly.

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Micrograph images of a holographic double frequency grating as the pre-alignment grating with a low spatial frequency of 22lines/mm (beat frequency of the double frequency grating).
168-1-1 AFM image of groove profile of the operation grating with 1000 lines/mm.

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Digital camera photo of an X-ray grating beam splitter fabricated by holographic method ¡¡

For more information on X-ray grating beam splitter, please see:

  • Journal Papers

    1. Ying Liu*, Xin Tan, Zhengkun Liu, Xiangdong Xu, Yilin Hong, and Shaojun Fu, ¡°Soft X-ray holographic grating beam splitter including a double frequency grating for interferometer pre-alignment,¡± Optics Express, 16(19), 14761-14770 (2008).

    2. Xin Tan, Ying Liu*, Xiangdong Xu, Yilin Hong, and Shaojun Fu, ¡°Grating beam splitter at 13.9nm,¡± Optics and Precision Engineering (in Chinese), accepted, (2009).

  • Conference papers

    1. Xin Tan, Ying Liu, and Shaojun Fu, ¡°The splitter grating used in the soft x-ray laser interferometer for plasma diagnosis,¡± Proc. SPIE, 6832, 683223-1-6, (2007).

    2. Xin Tan, Ying Liu, Zhengkun Liu, and Shaojun Fu, ¡°Measuring the parallelism of the splitter grating used in a soft X-ray laser interferometer,¡± Proc. SPIE, 6724, 67240J-1-5, (2007).

    3. Ying Liu, Xin Tan, Xiangdong Xu, Yilin Hong, and Shaojun Fu, ¡°Design and fabrication of soft X-ray blazed diffraction gratings,¡± Proc. SPIE, 6024, 60242N-1-7, (2006).

  • Patent

    1.     Liu Ying, Tan Xin, Xu Xiangdong, Hong Yilin, Fu Shaojun, X-ray holographic grating beam splitter, Chinese patent No.200810024295.0 (Pending).

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Last Update:2008-10-20

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