Research interests and activities

Part I. Diffraction optical elements

Holographic grating beam splitter for soft X-ray interferometer at 13.9nm

Extreme ultraviolet (EUV) gratings to suppress the high order harmonics of synchrotron radiation

Multilayer diffraction gratings (MDGs)

Phase Ronchi grating and other transmission diffractive optical elements (DOEs)

Soft X-ray phase condenser zone plate

• Journal Papers

  1. Ying Liu*, Xin Tan, Zhengkun Liu, Xiangdong Xu, Yilin Hong, and Shaojun Fu, “Soft X-ray holographic grating beam splitter including a double frequency grating for interferometer pre-alignment,” Optics Express, 16(19), 14761-14770 (2008).

  2. Xin Tan, Ying Liu*, Xiangdong Xu, Yilin Hong, and Shaojun Fu, “Grating beam splitter at 13.9nm,” Optics and Precision Engineering (in Chinese), accepted, (2009).

  3. Liu Ying, Xu Dequan, Xu Xiangdong, Zhou Xiaowei, Hong Yilin, and Fu Shaojun, “Characteristics of several common optical materials in ion beam etching,” Journal of University of Science and Technology of China (in Chinese), 37(4): 536-538,553 (2007).

  4.  Xu Zuodong, Liu Ying, Xu Xiangdong, Xu Dequan, and Fu Shaojun, “On-line etch depth detection of scanning ion beam etching of diffractive optical elements,” Microfabrication Technology (In Chinese), accepted, (2008).

  5. Wang Xudi, Liu Ying, Xu Xiangdong, Fu Shaojun, and Cui Zheng, “Reactive ion beam etching of HfO₂ film and removal of sidewall redeposition,” Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 24(4): 1067-1072, (2006).

  6. Wang Xudi, Liu Ying, Hong Yilin, Fu Shaojun, and Xu Xiangdong, “Reactive ion etching of HfO₂ films,” Vacuum Science and Technology (In Chinese), 24(4): 313-316, (2004).

  7. Wang Xudi, Liu Ying, Xu Xiangdong, Hong Yilin, and Fu Shaojun, “Ion beam etching of quartz and BK7 glass,” Vacuum Science and Technology (In Chinese), 24(4): 397-400, (2004).

  8. Xiao Kai, Liu Ying, and Fu Shaojun, “Analysis of Influence of 4 Fabrication Errors on X-ray Zone Plates by Summing up Diffraction Fields,” Microfabrication Technology (in Chinese), (4): 25-30, (2005).

  9. Xiao Kai ,Liu Ying, Xu Xiangdong, and Fu Shaojun, “Fabrication of Soft X-Ray Phase Condenser Zone Plates,” Acta Optica Sinica (in Chinese), 25(12): 1722-1723, (2005).

  10. Xiao Kai, Liu Ying, Chen Liang, Jiang Shiping, and Fu Shaojun, “Characterization of Relative Diffraction Performance of Soft X-Ray Zone Plates by Experiment,” Acta Optica Sinica (in Chinese), 26(10): 1598-1600, (2006).

  Conference papers

  1. Xin Tan, Ying Liu, and Shaojun Fu, “The splitter grating used in the soft x-ray laser interferometer for plasma diagnosis,” Proc. SPIE, 6832, 683223-1-6, (2007).

  2. Xin Tan, Ying Liu, Zhengkun Liu, and Shaojun Fu, “Measuring the parallelism of the splitter grating used in a soft X-ray laser interferometer,” Proc. SPIE, 6724, 67240J-1-5, (2007).

  3. Ying Liu, Xin Tan, Xiangdong Xu, Yilin Hong, and Shaojun Fu, “Design and fabrication of soft X-ray blazed diffraction gratings,” Proc. SPIE, 6024, 60242N-1-7, (2006).

  4. Ying Liu, Xiangdong Xu, Yilin Hong, Dequan Xu, and Shaojun Fu, “Reactive ion beam etching of multilayer diffraction gratings with SiO₂ as the top layer,” Proc. SPIE, 6832, 68322O-1-5, (2007).

  5. Ying Liu, Dequan Xu, Xiangdong Xu, Yilin Hong, and Shaojun Fu, “Reactive ion beam etching of large-aperture multilayer diffraction gratings by radio frequency ion beam source,” Proc. SPIE, 6724, 67240K-1-5, (2007).

  6. Keqiang Qiu, Xiangdong Xu, Ying Liu, Yilin Hong, and Shaojun Fu, “Methods of controlling grooves profile and the duty cycle of gold transmission phase gratings,” Proc. of SPIE, 6832, 68322L-1-7, (2007).

  7. Xiaowei Zhou, Dequan Xu, Ying Liu, Xiangdong Xu, and Shaojun Fu, “Amending the uniformity of ion beam current density profile,” Proc. of SPIE, 6832 68322N-1-6, (2007).

  8. Ying Liu, Jun Lou, Kai Xiao, Xiangdong Xu, Yilin Hong, and Shaojun Fu, “Studies on phase Ronchi gratings and the fabrication of soft x-ray condenser zone plates,” Proc. SPIE, 5636, 150-158, (2005).

  9. Kai Xiao, Ying Liu, and Shaojun Fu, “Electromagnetic analysis of diffractive lens with C method and local linear grating model,” Proc. SPIE, 5636, 546-550, (2005).

  Patents

  1. Liu Ying, Tan Xin, Xu Xiangdong, Hong Yilin, Fu Shaojun, X-ray holographic grating beam splitter, Chinese patent No.200810024295.0 (Pending).

  2. Liu Ying, Xu Xiangdong, Hong Yilin, Xu Dequan, Fu Shaojun, On-line optical measurement setup and method of scanning ion-beam etching of diffraction gratings,  Chinese patent No. 200710020220.0 (Pending).

  3. Liu Ying, Fu Shaojun, Liu Zhengkun, Xu Xiangdong, Hong Yilin, Spectral measurement of depth of phase Ronchi gratings,  Chinese patent No. 200810021578.x (Pending).

  4. Xu Zuodong, Liu Ying, Xu Xiangdong, Hong Yilin, Fu Shaojun, On-line interferometric measurement method of scanning ion-beam etching of transmission diffraction optical elements,  Chinese patent No. 200810025255.8 (Pending).