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¡¡¡¡Research Equipment£º
¡¡¡¡We have these research instruments hereinafter:
¡¡¡¡We use the DC
reactive sputtering ,
electron beam evaporation , RF
magnetron sputtering and MOCVD
to get ZnO films. We have a set of spectrum
apparatus to measure reflect spectrum ,
transmission spectrum and photo-conductance spectrum of films. We
have some basic electrics measurement of semiconductor such as Hall
Apparatus , DLTS.
AFM,High temperature vacuum furnace,And We have a Ellipsometer for
measuring the refractive index and thickness of the films. Now we
build in the LP-MOCVD for getting
SiC/ZnO and
their multi-layers, it is a new means to research wide-band semiconductor.
