Research Equipment


We have these research instruments hereinafter:

We use the DC reactive sputtering , electron beam evaporation , RF magnetron sputtering and MOCVD to get ZnO films. We have a set of spectrum apparatus to measure reflect spectrum , transmission spectrum and photo-conductance spectrum of films. We have some basic electrics measurement of semiconductor such as Hall Apparatus , DLTS. AFM,High temperature vacuum furnace,And We have a Ellipsometer for measuring the refractive index and thickness of the films. Now we build in the LP-MOCVD for getting SiC/ZnO and their multi-layers, it is a new means to research wide-band semiconductor.